The reporter understands from shenyang authorities, shall be borne by the shenyang fu chong precision equipment co., LTD of "twelfth five-year" national science and technology major projects "zero IC device key components integrated manufacturing technology and processing platform" on March 26, smoothly through the national 02 special acceptance. And muddy south area existing siasun robot, the core source of microelectronics, extension jing science and technology, the rich and the six companies such as precision for 14 countries 02 major projects of science and technology, national financial support, amounting to 695 million yuan under the policy support has formed a relatively complete system of IC equipment manufacturing.

IC equipment is known as the equipment manufacturing industry of the bead mu lang ma, is the foundation of the chip industry equipment, has become the focus of advanced equipment manufacturing industry competition. Shenyang fu chong "key components of IC (integrated circuit) equipment integrated manufacturing technology and processing platform" is around the high precision and engineering, surface treatment, vacuum electron beam welding, and other subjects, broke through a series of technical barrier, is now building into a set of precision mechanical processing, special surface treatment, precision welding in the integration of comprehensive service platform, IC equipment precision components formed reached the international standard of metal parts surface treatment and cleaning test facilities, through the various international advanced surface treatment process as well as the leading enterprises in the world IC equipment machine applied materials, inc., Tokyo, Japan electronic companies in the United States more than 40 items certification, rich and precise has become its global strategic suppliers.

Shenyang, shenyang via letter committee, said the companies to make major national special funds support, show that shenyang IC equipment manufacturing enterprise continuously made new progress in science and technology innovation, increasingly concentrated in the development of old industrial bases in northeast new kinetic energy. Shenyang rich "" IC equipment integrated manufacturing technology and key parts processing platform" project broke the core components in this field the passive situation, long-term dependence on foreign imports to fill the domestic blank, also to improve the overall competitiveness of China's IC equipment manufacturing industry chain has a promoting effect.