With the development of semiconductor technology, of the growing importance of silicon wafer cleaning. In recent years, this area not only has some up-and-coming Chinese companies, even out some of the "dark horse". It was not long ago, a Chinese native enterprises studying more than eight years, finally received a focus in the field of semiconductor cleaning technology breakthrough, solved the graphical structure wafer no damage problem of cleaning. A breakthrough in the technology of acm semiconductor equipment (Shanghai) co., LTD. Is the horse "dark horse". Acm semiconductor chairman, chief executive of wang hui confidence in independent research and development of revolutionary new technology.
In fact, since 70 nanometers, chip manufacturing yield began to fell, one of the main reason is that the particles on the silicon wafer, pollution, difficult to clean. As the line more do more thin, by 20 nanometers, the entire process, basically every two steps should be clean, and after to 1 x nano, if you want a higher yield almost every step in the process without washing.
As one of the key link in the integrated circuit industry chain, advanced semiconductor equipment has long been the United States, Japan and Europe several dominated industrial power, can be said to be a zero-based industry in China. "Before the equipment without a 12-inch wafer factory is made in China, until in recent years the situation has changed." , "said wang hui chip manufacturers and semiconductor equipment maker is complementary relationship, if a country without semiconductor equipment design, manufacturing capacity, it has always been in the field of high-tech to be disciplined by others." Now, acm semiconductor to enhance the yield as the breakthrough point, combined with reliable equipment operation data to LiWei hynix, smic, China into semiconductor, electronics, advanced long telegram, China crystal au clients such as repeat order, and through the acm with Sematech established long-term relations of cooperation.
As the semiconductor process from 2 d to 3 d, FinFET puts forward new challenge on silicon wafer cleaning, graphical structure on the surface of the wafer cleaning compared with flat cleaning, technology and requirements are much more complicated. "It can be said to be the semiconductor cleaning technology formidable a technical threshold, now it's time have to face." Wang hui is introduced, with the line width, deep wide than the increase of cleaning process difficulty also increases rapidly. In fact, over the past decade, many large companies have also tried on this issue, but most of them give up halfway. Acm is pursuit technology with a persistent passion to the extreme, after years of unremitting efforts, finally found the solution. It is understood that at present no damage of the latest physical cleaning technology has been in the customer 1 x nano graphics chip got preliminary validation. Wang hui, acm semiconductor next-generation cleaning technology not only can be used for FinFET graphics silicon wafer cleaning, can also be used in DRAM and Flash (Gao Shenkuan 15:1 even spake) key technology of cleaning.
The requirements of the development of semiconductor technology constantly updated, in the face of new problems and new technologies on the strain capacity of the semiconductor equipment enterprises are also put forward very high requirements. Beauty and pursuit the perfection of technology, is the great secret of success. Wang hui told the economist, acm for semiconductor devices, mainly is the three elements: differentiation time nodes entering the market, technology and global patent protection.
"In the face of the same application, the same technical challenges, you want to do better than large companies, seek the solution of the differentiation method, otherwise it will be difficult to more than large companies." In wang hui's view, from the perspective of technology innovation, a small company would not necessarily loss to the big company, but because of its flexibility and high efficiency, and it is easier to make a breakthrough technology. In the face of the structure of graphics wafer cleaning technology bottleneck, in other companies can't find a solution, acm whole finally fortunate to get this key, this time node is essential. In addition, acm semiconductor now has independent property rights and related patent, now apply for more than 419 international and domestic patents, and more than 116 items have been authorized, it is developing its own technology roadmap of the acm semiconductor and ensure continued competitiveness.
From the perspective of the development trend of the global semiconductor industry, the status of the Chinese market is on the rise, more than half of the IC in the future market in China. And the push of countries in recent years for the semiconductor industry, also let local semiconductor companies saw an opportunity. "I think China onto the world stage equipment company has just begun, acm lucky become a member, must will also have more later development equipment companies in China on a business trip of alienation, their own core technology products." An age of technology change, also is the Chinese semiconductor equipment companies fight for the historic opportunities for the development of space, wang hui is full of confidence. We believe that the acm will in the near future, progress further, as China's research and development, manufacture of semiconductor equipment out of Asia, into the world of the horn.
